Structural Transformation upon Nitrogen Doping of Ultrananocrystalline Diamond Films by Microwave Plasma CVD

Figure 3

(a) ATR/FT-IR spectra of undoped (blue) and N-doped (red) UNCD films by MWCVD at the center position (labeled #10). (b), (c) Deconvolution (green) of ATR/FTIR spectra of N-doped (top) and undoped (bottom) UNCD films at the center position in CH vibrational region of 2600∼3200 cm⁻¹ after baseline correction and by Gaussian fitting (red).

(a)

(b)

(c)