Topography (a)–(c) and IC-HFM amplitude
()–() and Phase ()–() images recorded over a same (700 × 700) n surface region
of a TiN coating. Images with the same letter (i.e., (a), (), and ()) were
simultaneously recorded. Tapping parameters: = 55.52 KHz, = 31% . Ultrasonic parameters: (a)–() = 4.800 MHz, = 4.449 MHz; (b)–() = 4.800 MHz, = 4.450 MHz; (c)–() = 4.800 MHz, = 4.451 MHz. and were kept constant. Greyscale range: (a)–(c) 35 nm; () 3.6 V, ()
6.5 V, () 3.2 V; () 4.2 V, ()
10 V (out-of-scale), () 5.0 V.
