Research Article

Origin of the Difference in the Resistivity of As-Grown Focused-Ion- and Focused-Electron-Beam-Induced Pt Nanodeposits

Figure 1

SEM images taken after cross-section experiments performed in (a) a FIBID Pt nanowire and (b) a FIBID Pt square deposit. In both cases, a layer of FEBID Pt is deposited on top of the FIBID deposits before ion milling in order to protect the area to be investigated and to get higher image contrast for reliable thickness measurements.