936863.fig.002a
(a) FEBID
936863.fig.002b
(b) FIBID
Figure 2: (a) Average volume per dose versus incident electron beam energy in the investigated Pt deposits by FEBID; (b) average volume per dose versus incident electron beam energy in the investigated Pt deposits by FIBID. The inset shows the volume per dose versus ion beam current in the investigated FIBID deposits at fixed incident beam energy of 10 kV.