936863.fig.009a
(a) FEBID
936863.fig.009b
(b) FIBID
Figure 9: Average Pt atomic content (measured by EDX) versus the incident beam energy used for the growth in the investigated (a) FEBID deposits and (b) FIBID deposits. In this last case the Ga content is also shown. An incident electron beam energy of 10 kV was always used for the EDX experiments.