Fabrication and Characterization of Hydrophilic TiO₂ Thin Films on Unheated Substrates Prepared by Pulsed DC Reactive Magnetron Sputtering

Figure 2

Ellipsometric model for TiO₂ thin films deposited on an Si substrate: (a) fitting model 1, (b) fitting model 2, and (c) cross-section TEM micrograph of TiO₂ thin film deposited at 10 mTorr (Sample A).

(a)

(b)

(c)