Structure and Optical Properties of Silicon Nanocrystals Embedded in Amorphous Silicon Thin Films Obtained by PECVD
Figure 1
Representative HRTEM images for six samples grown with different dichlorosilane to hydrogen flow rate ratios () and RF powers. The circular inserts show the Small Area Diffraction Patterns of the samples, and the square inserts show the size distributions and number densities of the silicon nanocrystalline inclusions.