Structure and Optical Properties of Silicon Nanocrystals Embedded in Amorphous Silicon Thin Films Obtained by PECVD

Figure 2

Comparison of Raman spectra of polymorphous silicon thin films grown with different 𝑅=Fr[SiH₂Cl₂]/Fr[H₂] and RF powers of (a) 50 Watts and (b) 150 Watts. The insert shows an example of the Raman spectra deconvolution in three peaks.

(a) Samples Grown at 50 Watt of RF Power

(b) Samples Grown at 150 Watt of RF Power