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Journal of Nanomaterials
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Journal of Nanomaterials
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2011
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Article
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Fig 7
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Research Article
Fabrication of Lateral Polysilicon Gap of Less than 50 nm Using Conventional Lithography
Figure 7
Capacitance (a), permittivity (b), and conductivity (c) profiles of different nanogap electrodes.
(a)
(b)
(c)