Structural and Mechanical Properties of CrN<sub>x</sub> Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance

<table>The EDS images of CrNx coatings deposited at Dts = 90 mm. (a) Samples without ion source assistance, N/Cr = 0.9075; (b) with ion source assistance, N/Cr = 0.9242.</table>

Journal of Nanomaterials

fig8

Figure 8

Figure 8: Structural and Mechanical Properties of CrN<sub>x</sub> Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance 

Figure 8 | Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance 