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Journal of Nanomaterials
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Journal of Nanomaterials
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2011
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Article
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Fig 3
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Research Article
Characterizations of InN Thin Films Grown on Si (110) Substrate by Reactive Sputtering
Figure 3
EDX of InN grown on Si (110) while the deposition gas is (a) 100% N
2
, (b) 75% N
2
-25% Ar, and (c) 50% N
2
-50% Ar.
(a)
(b)
(c)