Modeling and Simulation of Special Shaped SOI Materials for the Nanodevices Implementation

Figure 3

A segment of SOI structure with localization of interface charges (a) with 𝑄_𝐼1, 𝑄_𝐼2 as sheet charge density and (b) with 𝑄_𝐼1, 𝑄_𝐼2 scattered onto the Δ𝑡₁,Δ𝑡₂ thicknesses.

(a)

(b)