ZnO Nanowire Formation by Two-Step Deposition Method Using Energy-Controlled Hollow-Type Magnetron RF Plasma
Figure 7
Growth model of ZnO nanowires in case of Figure 5. (a) Irregular surface of Zn layer with particulate and pillar-like structures is formed in the 1st step. (b) Particulate and pillar-like structures are changed to hexagonal pillars, growing with time, by oxidization in the 2nd step. (c) Then, the hexagonal pillars start shrinking by Ar ion sputtering, which triggers a start of ZnO nanowire growth. (d) ZnO nanowires grow and bend in the presence of Ar ion bombardment. (e) The nanowire growth stops and decays with time by the ion sputtering, and finally smooth surface of ZnO layer comes out.
