Atomic-Level Investigation of CH_𝑥 and C₂H_𝑥 Adsorption on 𝛽-SiC (111) Surface for CVD Diamond Growth from DFT Calculations

Figure 2

The optimizing geometry of C₂H_𝑥 adsorption on the C-terminated surface: (a) the CH–C adsorption, (b) the CH₂–C adsorption, and (c) the CH₂–CH adsorption.