Research Article

Growth Mechanism of a Hybrid Structure Consisting of a Graphite Layer on Top of Vertical Carbon Nanotubes

Figure 1

Scheme of growth recipes and tool operations. During the first load step of 30 s, samples are transferred into the chamber at base pressure. A 10 s stabilization step is used for stabilizing sample temperature. The last growth step occurs in C2H2/Ar mixture (5/495 sccm) at a total pressure of 4.148 Torr and for 2, 5, or 10 minutes. Helium partial pressure is 0.148 Torr.
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