Table 1: The characteristics of the as-grown, oxygen-annealed, air-annealed, and vacuum-annealed Al-doped ZnO nanorod-array-based UV photoconductive sensors.

SampleResistance (MΩ)Dark current (A)Photocurrent (A)Rise time constant (s)Decay time constant (s)Responsivity (A/W)Sensitivity

As-grown0.806.29 × 10−63.91 × 10−538 1090.736.2
Oxygen-annealed1.593.03 × 10−61.69 × 10−43133.6955.6
Air-annealed0.162.26 × 10−52.39 × 10−410264.8110.6
Vacuum-annealed0.105.44 × 10−52.43 × 10−415524.194.6