Patterning Luminescent Nanocrystalline LaPO₄ : Eu and CePO₄ : Tb Particles Embedded in Hybrid Organosilica with Soft-Lithographic Techniques

Figure 3

SEM images of CePO₄ : Tb fluorescence NPs in hybrid silica; (a) line pattern made with MIMIC having 𝑤_𝑙=6 μm; (b) line pattern made with μTM showing residue of PDMS lines between the patterned lines as a result of strong adhesion; (c) line pattern made with μTM having 𝑤_𝑙=5 μm (left) and 𝑤_𝑙=3 μm (right); (d) μTM-derived line pattern showing displacement and detachment of the lines due to poor adhesion to the substrate; (e) μTM-derived pillars pattern having diameter of 𝑃_𝑑=800 nm (lower part), and 𝑃_𝑑=1500 nm (upper part); (f) pillar pattern showing the residue layer between the pillars.

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