Research Article

Optical and Structural Properties of Silicon Nanocrystals Embedded in SiOx Matrix Obtained by HWCVD

Figure 2

(a) Spectra FTIR of S i O 𝑥 films grown at different temperatures, (b) graphics composition of the silicon oxide phase obtained by FTIR and of the whole film found by EDAX.
368268.fig.002a
(a)
368268.fig.002b
(b)