Research Article
Effect of Si and SiO2 Substrates on the Geometries of As-Grown Carbon Coils
Table 1
Experimental conditions of the deposition of carbon coils for the different samples.
| | Process steps | Samples | C2H2 flow rate (sccm) | H2 flow
rate (sccm) | SF6 flow rate (sccm) | Total pressure (Torr) | Total deposition time (min) | Source gases flow time (min) | Substrate kinds and temp. (°C) | | C2H2 | H2 | SF6 |
| | (1) | A | — | — | — | | — | — | — | — | Si, 25 ~ 750 | | (1) | B | — | — | — | | — | — | — | — | SiO2, 25 ~ 750 | | (2) | C | 15 | 35 | 35 | 0 ~ 100 | — | — | — | — | Si, 750 | | (2) | D | 15 | 35 | 35 | 0 ~ 100 | — | — | — | — | SiO2, 750 | | (3) | E | 15 | 35 | 35 | 100 | 2 | 2 | 2 | 2 | Si, 750 | | (3) | F | 15 | 35 | 35 | 100 | 2 | 2 | 2 | 2 | SiO2, 750 | | (4) | G | 15 | 35 | 35 | 100 | 5 | 5 | 5 | 5 | Si, 750 | | (4) | H | 15 | 35 | 35 | 100 | 5 | 5 | 5 | 5 | SiO2, 750 | | (5) | I | 15 | 35 | 35 | 100 | 90 | 90 | 90 | 5 | Si, 750 | | (5) | J | 15 | 35 | 35 | 100 | 90 | 90 | 90 | 5 | SiO2, 750 |
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