Journal of Nanomaterials / 2012 / Article / Tab 1

Research Article

Effect of Si and SiO2 Substrates on the Geometries of As-Grown Carbon Coils

Table 1

Experimental conditions of the deposition of carbon coils for the different samples.

Process stepsSamplesC2H2 flow rate (sccm)H2 flow
rate (sccm)
SF6 flow rate (sccm)Total pressure (Torr)Total deposition time (min)Source gases flow time (min)Substrate kinds and temp. (°C)
C2H2H2SF6

(1)ASi, 25 ~ 750
(1)BSiO2, 25 ~ 750
(2)C1535350 ~ 100Si, 750
(2)D1535350 ~ 100SiO2, 750
(3)E1535351002 2 2 2Si, 750
(3)F1535351002 2 2 2SiO2, 750
(4)G1535351005 5 5 5Si, 750
(4)H1535351005 5 5 5SiO2, 750
(5)I15353510090 90 90 5Si, 750
(5)J15353510090 90 90 5SiO2, 750

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