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Journal of Nanomaterials
Volume 2012, Article ID 409123, 6 pages
Research Article

Zigzag and Helical AlN Layer Prepared by Glancing Angle Deposition and Its Application as a Buffer Layer in a GaN-Based Light-Emitting Diode

1Department of Electro-Optical Engineering, National Taipei University of Technology, 1, Section 3, Chung-Hsiao E. Road, Taipei 106, Taiwan
2Key Laboratory of Interface Science and Engineering in Advanced Materials, Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 79 W. Yingze Street, Shanxi, Taiyuan, China

Received 30 May 2012; Accepted 5 September 2012

Academic Editor: Jinquan Wei

Copyright © 2012 Lung-Chien Chen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [6 citations]

The following is the list of published articles that have cited the current article.

  • P. Pedrosa, C. Lopes, N. Martin, C. Fonseca, and F. Vaz, “ELECTRICAL CHARACTERIZATION OF Ag:TiN THIN FILMS PRODUCED BY GLANCING ANGLE DEPOSITION,” Materials Letters, 2013. View at Publisher · View at Google Scholar
  • Farn-Shiun Hwu, “Simulation of an Improved Design for n-Electrode with Holes for Thin-GaN Light-Emitting Diodes,” Journal of Nanomaterials, vol. 2013, pp. 1–6, 2013. View at Publisher · View at Google Scholar
  • Zhifeng Huang, and Fan Bai, “Wafer-scale, three-dimensional helical porous thin films deposited at a glancing angle,” Nanoscale, vol. 6, no. 16, pp. 9401–9409, 2014. View at Publisher · View at Google Scholar
  • Chen-Hung Tsai, Mu-Hsin Ma, Yu-Feng Yin, Hsiang-Wei Li, Wei-Chih Lai, and Jianjang Huang, “Nanoscale epitaxial lateral overgrowth of GaN-based light-emitting diodes on an AlN nanorod-array template,” IEEE Journal of Quantum Electronics, vol. 51, no. 5, 2015. View at Publisher · View at Google Scholar
  • Paulo Pedrosa, Diogo Machado, Patrique Fiedler, Beatriz Vasconcelos, Eduardo Alves, Nuno P. Barradas, Nicolas Martin, Jens Haueisen, Filipe Vaz, and Carlos Fonseca, “Electrochemical characterization of nanostructured Ag:TiN thin films produced by glancing angle deposition on polyurethane substrates for bio-electrode applications,” Journal of Electroanalytical Chemistry, 2016. View at Publisher · View at Google Scholar
  • Fu, Iborra, Du, Milne, Luo, Nguyen, Walton, Flewitt, Zu, Li, McHale, and Matthews, “Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications,” Progress in Materials Science, vol. 89, pp. 31–91, 2017. View at Publisher · View at Google Scholar