Zigzag and Helical AlN Layer Prepared by Glancing Angle Deposition and Its Application as a Buffer Layer in a GaN-Based Light-Emitting Diode

<table>Typical XRD pattern of zigzag and helical AlN nanorod structures deposited at various oblique angles on a sapphire substrate.</table>

Journal of Nanomaterials

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Figure 3: Zigzag and Helical AlN Layer Prepared by Glancing Angle Deposition and Its Application as a Buffer Layer in a GaN-Based Light-Emitting Diode 

Figure 3 | Zigzag and Helical AlN Layer Prepared by Glancing Angle Deposition and Its Application as a Buffer Layer in a GaN-Based Light-Emitting Diode 