The Effect of Mg Dopant and Oxygen Partial Pressure on Microstructure and Phase Transformation of ZnTiO_𝟑 Thin Films

Table 2

The elements analysis of zinc titanate thin films at different oxygen partial pressure was measured using ESCA equipment.

Substrate	Oxygen partial pressure	Surface element composition, X%			Zn/Ti
temperature (°C)	(Ar to O2 ratio)	Zn2p	Ti2p	O1s
400	50/0 (10 : 0)	13.23	20.55	63.19	0.64
400	45/5 (9 : 1)	11.07	22.22	65.57	0.50
400	40/10 (8 : 2)	12.23	20.92	65.41	0.58