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Journal of Nanomaterials
Volume 2012, Article ID 562701, 8 pages
http://dx.doi.org/10.1155/2012/562701
Research Article

Effects of Additional Oxygen Flow on the Optical and Electrical Properties of Ion Beam Sputtering Deposited Molybdenum-Doped Zinc Oxide Layer

1Department of Mechanical Engineering, Chien Kuo Technology University, Changhua City 500, Taiwan
2Department of Materials Science and Engineering, Feng Chia University, Taichung City 40724, Taiwan
3Graduate Institute of Biomedical Materials and Tissue Engineering, College of Oral Medicine, Taipei Medical University, Taipei City 110, Taiwan

Received 20 March 2012; Revised 4 May 2012; Accepted 6 May 2012

Academic Editor: Ping Xiao

Copyright © 2012 Chin-Chiuan Kuo et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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