Large-Scale Integrated Carbon Nanotube Gas Sensors

Figure 14

(a) The initial resistance values of unit sensors ranged from 172.7 to 169.2 Ω. NO₂ concentration was varied from 50 to 500 ppb with scanning temperatures. (b) A chart of sensitivity changes by varying temperatures and gas concentrations. (c) A chart of temperature effects on sensitivity by fixing NO₂ concentration. The sensitivity values were normalized by the peak sensitivity for different concentrations [27].

(a)

(b)

(c)