Raman Spectroscopy of DLC/a-Si Bilayer Film Prepared by Pulsed Filtered Cathodic Arc

Figure 4

The plot modified from the three-stage model [7] to obtain structural characteristics of DLC in the bilayer film. Four structures are presented: nanocrystalline-graphite (NC-graphite), graphite, amorphous carbon (a-C), and tetrahedral amorphous carbon (ta-C).