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Journal of Nanomaterials
Volume 2012, Article ID 853021, 5 pages
http://dx.doi.org/10.1155/2012/853021
Research Article

Study of High Quality Indium Nitride Films Grown on Si(100) Substrate by RF-MOMBE with GZO and AlN Buffer Layers

1Instrument Technology Research Center, National Applied Research Laboratories, 20 R&D Road VI, Hsinchu Science Park, Hsinchu, 30076, Taiwan
2Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan

Received 17 September 2012; Revised 22 November 2012; Accepted 22 November 2012

Academic Editor: Li Li

Copyright © 2012 Wei-Chun Chen and Shou-Yi Kuo. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [8 citations]

The following is the list of published articles that have cited the current article.

  • V. D. Compean Garcia, I. E. Orozco Hinostroza, A. Escobosa Echavarria, E. Lopez Luna, A. G. Rodriguez, and M. A. Vidal, “High-quality InN films on MgO (100) substrates: The key role of 30 degrees in-plane rotation,” Applied Physics Letters, vol. 104, no. 19, 2014. View at Publisher · View at Google Scholar
  • Cinzia Caliendo, “Longitudinal Modes along Thin Piezoelectric Waveguides for Liquid Sensing Applications,” Sensors, vol. 15, no. 6, pp. 12841–12856, 2015. View at Publisher · View at Google Scholar
  • Roohallah Taghavi Mendi, Amir Zelati, Masoud Majidiyan Sarmazdeh, Arash Boochani, and Fariba Nofeli, “First-principles study of optical properties of InN nanosheet,” International Journal of Modern Physics B, vol. 30, no. 19, 2016. View at Publisher · View at Google Scholar
  • Zhi-Yin Lee, Siti Aisyah Binti Osman, Chee Yong Fong, and Sha Shiong Ng, “Radio-frequency sputtering growth of indium nitride thin film on flexible substrate,” Materials Science Forum, vol. 846, pp. 650–656, 2016. View at Publisher · View at Google Scholar
  • Zhi Yin Lee, Sha Shiong Ng, Fong Kwong Yam, and Zainuriah Hassan, “Effects of coating cycles on spin-coated indium nitride thin films,” Surface Engineering, pp. 1–8, 2017. View at Publisher · View at Google Scholar
  • Zhi Yin Lee, Sha Shiong Ng, Fong Kwong Yam, and Zainuriah Hassan, “Influences of elevated thermal decomposition of ammonia gas on indium nitride grown by sol?gel spin coating method,” Materials Research Bulletin, 2017. View at Publisher · View at Google Scholar
  • Zhi Yin Lee, Sha Shiong Ng, and Fong Kwong Yam, “Growth mechanism of indium nitride via sol–gel spin coating method and nitridation process,” Surface and Coatings Technology, vol. 310, pp. 38–42, 2017. View at Publisher · View at Google Scholar
  • Ritam Sarkar, Kankat Ghosh, Swagata Bhunia, and Apurba Laha, “Effect of nitridation time on structural, optical and electrical properties of InN films grown on c-sapphire substrates by PAMBE,” Journal of Materials Science: Materials in Electronics, vol. 29, no. 5, pp. 3927–3934, 2018. View at Publisher · View at Google Scholar