ZnO Nanoparticles on Si, Si/Au, and Si/Au/ZnO Substrates by Mist-Atomisation

Table 1

Characteristics of ZnO nanostructured thin film from XRD analysis, grown on different Si substrate.

Type of surface	Bare Si (Si)		Gold-seeded Si (Si/Au)		ZnO nanorods on gold-seeded Si (Si/Au/ZnO)
Substrate temperature (°C)	Lattice constant (Å) and 𝑐/𝑎 ratio	Crystallite size (nm) and % strain	Lattice constant (Å) and 𝑐/𝑎 ratio	Crystallite size (nm) and % strain	Lattice constant (Å) and 𝑐/𝑎 ratio	Crystallite size (nm) and % strain
200	𝑎=3.244	20.6; 0.109	𝑎=3.246	7.6; 0	𝑎=3.246	32.2; 0.257
	𝑐=5.199		𝑐=5.196		𝑐=5.103
	𝑐/𝑎=1.603		𝑐/𝑎=1.601		𝑐/𝑎=1.572
300	𝑎=3.242	29.3; 0.300	𝑎=3.243	11.6; 0	𝑎=3.246	32.9; 0.069
	𝑐=5.196		𝑐=5.195		𝑐=5.193
	𝑐/𝑎=1.603		𝑐/𝑎=1.602		𝑐/𝑎=1.600
400	𝑎=3.245	43.0; 0	𝑎=3.444	19.3; 0	𝑎=3.247	6.34; 0
	𝑐=5.202		𝑐=5.517		𝑐=5.202
	𝑐/𝑎=1.603		𝑐/𝑎=1.601		𝑐/𝑎=1.602