Size-Dependent Dynamic Behavior of a Microcantilever Plate

Table 3

Relative change in the first orders of the natural frequencies of the plate with different thicknesses.

Poisson’s ratio	Relative change in natural frequencies
	h = 1 μm	h = 2 𝜇m	h = 3.5 𝜇m	h = 5 𝜇m
0.25	9.63	4.39	2.20	1.34
0.30	9.44	4.22	2.09	1.28
0.35	8.90	4.03	1.99	1.20