Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited on c-Plane Sapphire

Figure 1

Typical cyclic nanoindentation load-displacement curves for AlN thin film obtained with a Berkovich indenter. Results show clear “pop-in” behaviors during loading, while no “pop-out” event is evident in unloading segments. AFM micrograph (inset) shows the indentation at an indentation load of 80 mN.