Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited on <i>c</i>-Plane Sapphire

<table>A bright-field XTEM image immediately under the Berkovich indent applied on the AlN thin film with an indentation load of 80 mN.</table>

Journal of Nanomaterials

Figure 3: Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited on <i>c</i>-Plane Sapphire 