Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited on c-Plane Sapphire

Table 1

Hardness and Young’s modulus of AlN thin films investigated in this study and those reported in the literatures.

	AlN thin film	Hardness, 𝐻 (GPa)	Young’s modulus, 𝐸𝑓 (GPa)
Ji et al. [15]	AlN/Si(100)	12.5~14.5	—
Barshilia et al. [16]	AlN/Si(100)	12	225
Yate et al. [17]	AlN/Si(100)	10.56 ± 0.07~17.2 ± 0.6	104 ± 13~115 ± 13
Laksana et al. [11]	AlN/Si(111)	24.79 ± 0.33	223.92 ± 5.34
Wang et al. [6]	AlN/GaN/c-sapphire	22	332
Jian and Juang^#	AlN/c-sapphire	16.2	243.5

^#The present study.