Research Article
3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles
Table 1
Proposed reaction, classification, activation energy, and preexponential factor considered in the model.
| Proposed reaction | Classification | Activation energy (kJ/mol) | Preexponential factor (1/s) |
| (1) Ti(OC4H9)4 → TiO2(g) + 4C4H8 + 2H2O | Volumetric decomposition | 70.5 | 3.96 × 105 | (2) Ti(OC4H9)4 + 2H2O → TiO2(g) + 4C4H9OH | Volumetric hydrolysis | 8.43 | 3.0 × 1015 | (3) Ti(OC4H9)4 → TiO2(s) + 4C4H8 + 2H2O | Surface deposition by TBOT | 126.01 | 1.0 × 109 | (4) TiO2(g) → TiO2(s) | Surface deposition by TiO2 | 126.01 | 1.0 × 109 |
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