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Journal of Nanomaterials
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Journal of Nanomaterials
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2013
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Article
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Fig 2
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Research Article
The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films
Figure 2
The fabrication processes for the dual-mode TFBAR devices.
(a)
Substrate cleaned by RCA process
(b)
deposited by LPCVD
(c)
etched by RIE
(d)
Bottom electrode deposited by DC sputter
(e)
AIN deposited by RF sputter
(f)
AIN etched
(g)
Top electrode deposited by DC sputter
(h)
Si etched by KOH