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Journal of Nanomaterials
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Journal of Nanomaterials
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2013
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Article
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Fig 6
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Research Article
The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films
Figure 6
The cross sectional SEM images of AlN thin films deposited at 5 mTorr with an off-axis distance of 50 mm.