One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers
Figure 6
Control of the nanostructure density and measurement of optical properties. ((a), (b)) Hierarchical structures having high density and low density, respectively. ((c), (d)) Surface with antireflectivity over a broad wavelength region; the specular reflection and diffuse reflection are suppressed by the density of the nanostructure.
