Review Article

The Development of Silicon Nanowire as Sensing Material and Its Applications

Figure 3

(a) Ag assisted chemical etching mechanism (b) view SEM image of Au-assisted electroless etched silicon in 15 g NH4HF2; 40 mL H2O2; 50 mL H2O solution of pH-1 in room temperature for 30 min. (Reprinted with permission from [59].)
328093.fig.003a
(a)
328093.fig.003b
(b)