The Development of Silicon Nanowire as Sensing Material and Its Applications

Table 1

SiNWs synthesis techniques.

Technique		Material	Reference
Bottom-up approach	Vapour liquid solid (VLS)	Coating catalyzed metals on silicon substrate-CVD	[39–42]
		Coating catalyzed metals on silicon substrate-laser ablation	[43]
		Si wafer coated metal catalyst introduced with Si gas source	[44, 45]
	Oxide assisted growth (OAG)	OAG-thermal evaporation	[46–50]
		OAG-HF	[51]
	Metal assisted chemical etching	Electroless metal deposition-chemical etching	[54–60]
Top-down approach		Electron beam lithography	[61]
		Nanoimprint lithography	[62]
		DEA technology and photolithography	[63]
		Photolithography-DRIE-TMAH-thermal oxidation	[64]
		Angled thin-film deposition-micrometer scale photolithography	[65]
		Lateral bridging growth	[70]