The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer

Table 3

Parameters of the IBAD modified samples (thickness of the carbon nanolayer, fluence of the nitrogen ions).

Sample	A	B	C	D
Nanolayer thickness (nm)	20	40	20	40
Fluence (cm^−2)	1 · 10^17	1 · 10^17	5 · 10^16	5 · 10^16