Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems

Figure 2

Cross-sectional SEM images of the pure DLC film (a); films with 1.08 at.% W (b), 4.38 at.% W (c), and 31.74 at.% W (d).

(a)

(b)

(c)

(d)