Fabrication of Silicon Nitride Ion Sensitive Field-Effect Transistor for pH Measurement and DNA Immobilization/Hybridization

Table 1

Drain current measured at different concentrations of complimentary target DNA.

DNA target concentrations (μM)	𝐼𝐷 at 𝑉𝐷=2 V (mA)
10	2.47
5	1.81
1	1.34
0.1	1.30