Surface Modification on the Sputtering-Deposited ZnO Layer for ZnO-Based Schottky Diode

Table 4

Compositions of the O–Zn and O–H chemical bonds for the untreated and H₂O₂-treated ZnO layer surfaces.

Samples	Untreated	H2O2-treated
O–Zn (%)	59	39
O–H (%)	41	61