Structure and Properties of Nanostructured (Ti-Hf-Zr-V-Nb)N Coatings

Figure 1

Images obtained by the scanning microscope JEOL-7000 F: (a) is the coating surface in reflected electrons; (b) shows microanalysis of coatings, N, Ti, V, Zr, Nb, obtained under 𝑈_bias=−100 V, pressure 𝑃=2×10⁻²; (c) shows microanalysis of coatings, N, Ti, V, Zr, Nb, obtained under 𝑈_bias=−200 V, pressure 𝑃=3×10⁻²; (d) shows microanalysis of coatings, N, Ti, V, Zr, Nb after annealing 873 K (for 30 min, at pressure in chamber 100 Pa).

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