Structure and Properties of Nanostructured (Ti-Hf-Zr-V-Nb)N Coatings

Table 1

Parameters of deposition and concentration of obtained coatings using C-PVD (concentration was measured using EDX-JEOL-7007F).

No.	Material	𝑈bias, V	𝑃, Pa	Concentration, %
				N	Ti	V	Zr	Nb	Hf
505	TiZrHfVNbN	110	0.5×10^−1	49.15	16.63	5.91	8.17	8.88	11.26
506	TiZrHfVNbN	100	0.2×10^−1	49.05	22.92	5.04	6.84	7.47	8.68
507	TiZrHfVNbN	50	5×10^−2	51.13	25.31	4.72	5.70	6.31	6.84
509	TiZrHfVNbN	100	3×10^−1	44.7	25.31	4.57	7.60	7.99	9.83
510	TiZrHfVNbN	50	2×10^−1	49.11	19.67	5.65	7.68	8.24	9.64
512	TiZrHfVNbN	200	8×10^−2	46.65	17.03	2.79	12.01	12.54	8.98
513	TiZrHfVNb	40	8×10^−2	—	34.66	8.88	19.53	23.16	13.76
514	TiZrHfVNbN	200	2×10^−1	47.69	16.41	1.93	13.34	13.90	6.72
515	TiZrHfVNbN	200	3×10^−2	36.05	20.13	2.28	17.12	17.50	6.93
523	TiZrHfVNbN	200	2×10^−1	43.44	17.80	1.45	16.39	16.99	3.92