Fabrication of Light Extraction Efficiency of Organic Light-Emitting Diodes with 3D Aspherical Microlens by Using Dry Etching Process
Figure 4
The results with different parameters of dry etching process: (a) the 1st experiment with oxygen concentration of 10 sccm, (b) the 2nd experiment with oxygen concentration of 5 sccm, (c) the 3rd experiment with oxygen concentration of 1 sccm, and (d) the 4th experiment without oxygen.
