Journal of Nanomaterials / 2013 / Article / Tab 1

Research Article

Fabrication of Light Extraction Efficiency of Organic Light-Emitting Diodes with 3D Aspherical Microlens by Using Dry Etching Process

Table 1

The parameters of RIE.

No.Pressure (mTorr) O2 (sccm)Time (minutes)Diameter (μm)Height (μm)Aspect ratio

125101036.5816.810.45
22551031.7621.830.68
32511030.8322.570.73
42501030.6522.800.74

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