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Journal of Nanomaterials
Volume 2013, Article ID 825285, 7 pages
Research Article

Precise Alignment of Individual Single-Walled Carbon Nanotube Using Dielectrophoresis Method for Development and Fabrication of pH Sensor

Institute of Nano Electronic Engineering (INEE), Universiti Malaysia Perlis (UniMAP), 01000 Kangar, Perlis, Malaysia

Received 6 August 2013; Accepted 10 October 2013

Academic Editor: Chunyi Zhi

Copyright © 2013 U. Hashim et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Development and fabrication of single-walled carbon nanotube (SWNT) based pH sensor were reported. The precise alignment of individual SWNT using dielectrophoresis method between the two microgap electrodes was conducted, and the effects of precise alignment of individual SWNT on impedance, long term stability, and capacitance of the sensor were studied. The pH sensor was fabricated using conventional photolithography and wet etching process. The impedance values were found to decrease in the order of distilled water > pH 10 > pH 5 > pH 3 > air. Without the alignment of SWNT, the capacitances values decreased with increasing of pH values at low frequency. All the impedance and capacitance results were highly repeatable.