Sub-15 nm Silicon Lines Fabrication via PS-b-PDMS Block Copolymer Lithography
Figure 4
SEM images of silicon nanostructures. (a) Silicon nanowires after 15 s silicon etch. (b) Silicon nanostructures after 20 s silicon etch. (c) No pattern transfer in bilayer and multilayer regions. (d) Complete pattern transfer in monolayer regions of PS-b-PDMS template. Inset (d) shows the high resolution image of nanowires.
