Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness

Figure 6

Indentation picture of SiCN film on SS 304 (a) film E; HSH layer at 2000 gf, (b) Film A at 1000 gf and (c) Film D; SH layer at 1000 gf.

(a)

(b)

(c)