Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness

Table 1

Deposition parameters for the single-layer and multilayer Si–C–N films deposited by DC magnetron sputtering.

Type of coating	Nature of coating	Nitrogen pressure (mbar)	Argon pressure (mbar)	Deposition pressure (mbar)
Single-layer SiCN coating (A)	Hard	0.001	0.009	0.01-0.02
Single-layer SiCN coating (B)	Soft	0.099	0.001	0.09-0.1
Double-layer SiCN coating (C) (AB)	Hard	0.001	0.009	0.01
	Soft	0.099	0.001	0.09-0.1
Double-layer SiCN coating (D) (BA)	Soft	0.099	0.001	0.09-0.1
	Hard	0.001	0.009	0.01-0.02
Trilayer SiCN (E) (ABA)	Hard	0.001	0.009	0.01
	Soft	0.099	0.001	0.09-0.1
	Hard	0.001	0.009	0.01