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Journal of Nanomaterials
Volume 2013 (2013), Article ID 953790, 10 pages
Research Article

Enhanced Visible Light Absorption by 3C-SiC Nanoparticles Embedded in Si Solar Cells by Plasma-Enhanced Chemical Vapor Deposition

Department of Mechanical Engineering and Research Center of Industrial Technology, Chonbuk National University, Jeonju 561-756, Republic of Korea

Received 23 July 2013; Revised 4 October 2013; Accepted 28 October 2013

Academic Editor: Takuya Tsuzuki

Copyright © 2013 Bhaskar Parida et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Solar cells with 3C-SiC nanoparticles embedded in the Si were investigated by plasma-enhanced chemical vapor deposition. Several sizes of SiC nanoparticles were used as the intermediate layer for the solar cell. The Si thin films showed the formation of micro- and nanocrystallites on the SiC nanoparticle sites, which play an important role of heating block as a nanosubstrate. The Raman spectra revealed that the SiC nanoparticles were embedded in mixed phases of amorphous and nanocrystalline Si. Compared to the conventional solar cell sample, the photoreflectance was significantly reduced in the UV/visible spectral region due to the presence of the embedded 3C-SiC nanoparticles. The Si nanocrystals formed by the thin film deposition played an important role in reducing the photoreflectance within the visible to infrared spectral zones. Furthermore, the SiC nanoparticles contributed less in the photoabsorption at a longer infrared spectral zone wavelength of 1200 nm.